Excimer Vacuum
Ultraviolet Lamp
l National-level imported technology projects, international
cutting-edge optoelectronic technology;
l The light source emits 7.2eV high-energy photons, which is higher
than the 6.69eV of the 185nm mercury lamp, which is enough to open the
molecular bonds of most organic substances in nature and overcome the inherent
technical bottleneck of the mercury lamp;
l The light source produces more Strong UV output, incoherent light,
which is conducive to large-area irradiation processing;
l Induction lamp with tube structure, which has a greatly extended
service life;
l Turning on and running is not affected by ambient temperature;
l The light source can be restarted immediately without preheating,
Ready to use; The lamp tube does not contain mercury, no secondary pollution,
and is green and environmentally friendly.
l Lamp Life:Air cooling for 1500 hours, water cooling for 4000 hours
Main technical data:
|
Item
|
Value
|
|
Lamp model
|
U172P90
|
|
Wavelength
|
172 nm
|
|
Rated power
|
90 W
|
|
Lamp length/luminous length
|
406/366 mm
|
|
Lamp lead
|
φ3x300 mm
|
|
Cooling method
|
water cooling/forced air Cooling
|
|
Dedicated power supply model
|
UP90
|
|
Dedicated power supply
|
AC220V/50Hz
|
|
Power supply automatic protection
|
overheating and load open circuit
protection
|
|
Power supplycooling method
|
forced air cooling
|
|
Input/output lead
|
φ2.4x300/φ6x300 mm
|
|
Appearance size
|
180(L)x70(W)x53 (H) mm
|
|
Gross weight
|
1 kg
|
Note: The above technical indicators are
subject to update without notice. If users have special requirements, they can
be specially designed and customized.
Typical application field:
The energy of excimer vacuum ultraviolet
photon with wavelength of 172nm is as high as 7.2 eV, which is enough to open
most molecular bonds in nature, and can realize photochemical reactions that
are difficult or impossible to achieve with traditional low-pressure mercury
lamps. It can be widely used in:
l Surface cleaning . It can be used in the cleaning process of wafer
and flat panel display manufacturing, cleaning masks, and removing photoresist;
l Surface etching and modification (such as polyimide, fluorine
materials, etc.).
l Low-temperature photochemical vapor deposition (Photo-CVD). Such as
electronic film Ta2O5 and HfO2, etc.;
l Photo-oxidation, photo-annealing. Such as processing electronic thin
film SiO2 to improve its stoichiometry;
l Photocatalytic metallization at room temperature. Such as plating
metal electrodes on the plastic surface;
l Surface activation to increase surface tension and wettability;
l Organic degradation. Such as photodegradation of VOCs and malodorous
odor treatment, removal of total organic carbon (TOC) to produce ultrapure
water, treatment of micro-pollution of drinking water, decomposition of
pesticide residues, photochemical decolorization of printing and dyeing
wastewater;
l High-purity ozone generator.
Schematic diagram of lamp installation and
wiring:
It is recommended that the lamp be fixed
and installed at both ends of the lamp head at the same time. The leads at both
ends of the lamp cap are respectively connected to the two thick-wired output
terminals of the dedicated power supply as shown in the figure, and confirm
that the ground wire E of the dedicated power supply terminal is reliably
connected to the earth.
The price includes power supply